Factory/Site Assessment (FAT/SAT) is performed in stages based on a standard list, and the process and guidelines are transparent and traceable, allowing you to make quick technical and import decisions.

We focus on key aspects in the lithography Track process, and use equipment and control algorithms to stabilize core factors that affect yield such as temperature and humidity and process water in the production line, baking heating uniformity, and photoresist coating accuracy.

Flexible customization by module, including control logic, communication/interfaces, piping and manifolds, heating zones, etc. You just need to provide URS and we'll reconfigure the right solution accordingly.

It adopts a forward-accessible structural layout, and the position of consumables/filter elements/valves is intuitive; it is equipped with fault diagnosis scenarios, with the goal of reducing downtime when a fault occurs.

Compatible with mainstream industrial communication and interlocking, alarms, recipes and historical data can be connected according to the specifications of the opposite system, making it easy to incorporate into the existing operation and maintenance system.

Integrating “ Temperature and Humidity Control (THC) and Process Water/Cooling Water Control (Pcw)”into the same rack significantly reduces installation, piping and maintenance complexity, and allows faster adaptation to production line changes.

Provide calibration reports and PM guidelines based on recommended spot inspection and calibration rhythms based on use scenarios to easily incorporate your company's existing quality and maintenance standards.

Combined with the on-site power supply and control system, provide configuration suggestions such as constant current/constant voltage, SSR/DC-DC; through parameter tuning, the temperature can be quickly stabilized according to the target trajectory.

Balancing in-plane temperature uniformity with fast dynamic response. Through the collaborative optimization of ceramic substrates, zone heating, nickel chromium heaters and sensing feedback, the process window can be "dropped" faster and more stably.

Provide installation and parameter adjustment suggestions including constraints such as equipment layout, relative height, and line speed, with the focus on shortening the stabilization period in the early stage of introduction.

Check the liquid-contacting materials according to the customer's chemical list, and jointly design durability and compatibility tests to ensure long-term stable operation.

Integrate Suckback with the pump body and shorten the pump-nozzle distance, reduce dead volume and response lag, and improve formula reproducibility and actual coating consistency.

Historical records of equipment status, recipes and alarms can be exported as files or databases, and can be connected to upper systems (such as MES) as needed; the data format and storage strategy can be negotiated and determined with you.

On the basis of standard warranty (excluding consumables), options such as on-site maintenance, spare parts and rework are provided; response and recovery target times are clearly stipulated in the contract.

Both standard and customized models are implemented according to the scope and plan agreed upon by both parties; integrated support for installation, commissioning, parameter adjustment and training can be provided.

Provide drawings, BOM, I/O lists, user manuals (optional in Chinese/English/Korean), FAT/SAT lists and training materials in a unified format, and comply with applicable local safety regulations.